Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7268062 | Method of crystallizing a semiconductor film using laser irradiation | Koichiro Tanaka | 2007-09-11 |
| 6872910 | Laser irradiation apparatus and method of fabricating a semiconductor device | Koichiro Tanaka | 2005-03-29 |
| 6573162 | Laser irradiation apparatus and method of fabricating a semiconductor device | Koichiro Tanaka | 2003-06-03 |