Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7664365 | Beam homogenizer, and laser irradiation method, laser irradiation apparatus, and laser annealing method of non-single crystalline semiconductor film using the same | Koichiro Tanaka | 2010-02-16 |
| 7393764 | Laser treatment apparatus, laser treatment method, and manufacturing method of semiconductor device | Koichiro Tanaka, Yoshiaki Yamamoto | 2008-07-01 |