Issued Patents All Time
Showing 51–52 of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7160762 | Method for manufacturing semiconductor device, semiconductor device, and laser irradiation apparatus | Shunpei Yamazaki, Osamu Nakamura | 2007-01-09 |
| 7067403 | Method for manufacturing a semiconductor device that includes adding noble gas to a semiconductor film and then irradiating the semiconductor film with laser light in the presence of a magnetic field | Shunpei Yamazaki, Osamu Nakamura, Koichiro Tanaka | 2006-06-27 |