Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7985604 | Method of manufacturing photoelectric conversion device | Sho Kato, Kosei Nei, Ryu Komatsu, Akihisa Shimomura, Koji Dairiki | 2011-07-26 |
| 7951656 | Method for manufacturing semiconductor device | Sho Kato, Satoshi Toriumi, Hideto Ohnuma | 2011-05-31 |
| 7947523 | Method for manufacturing photoelectric conversion device | Sho Kato, Satoshi Toriumi | 2011-05-24 |
| 7939426 | Manufacturing method of SOI substrate | Sho Kato, Kosei Nei, Ryu Komatsu, Tatsuya Mizoi, Akihisa Shimomura | 2011-05-10 |
| 7858431 | Method of manufacturing photoelectric conversion device | Sho Kato, Koji Dairiki | 2010-12-28 |
| 7851318 | Semiconductor substrate and method for manufacturing the same, and method for manufacturing semiconductor device | Masaki Koyama, Akihisa Shimomura, Junpei Momo | 2010-12-14 |
| 7842584 | Method for manufacturing semiconductor device | Sho Kato, Tetsuya Kakehata, Hiromichi Godo, Akihisa Shimomura | 2010-11-30 |
| 7781308 | Method for manufacturing SOI substrate | Sho Kato, Ryu Komatsu, Kosei Nei, Akihisa Shimomura | 2010-08-24 |
| 7767547 | Manufacturing method of SOI substrate | Sho Kato, Kosei Nei, Ryu Komatsu, Tatsuya Mizoi, Akihisa Shimomura | 2010-08-03 |