AT

Atsuhiro Tani

SL Semiconductor Energy Laboratory: 11 patents #504 of 1,113Top 50%
Overall (All Time): #459,723 of 4,157,543Top 15%
11
Patents All Time

Issued Patents All Time

Showing 1–11 of 11 patents

Patent #TitleCo-InventorsDate
10134784 Peeling apparatus and manufacturing apparatus of semiconductor device Shingo Eguchi, Yohei Monma, Misako Hirosue, Kenichi Hashimoto, Yasuharu HOSAKA 2018-11-20
9570329 Peeling apparatus and manufacturing apparatus of semiconductor device Shingo Eguchi, Yohei Monma, Misako Hirosue, Kenichi Hashimoto, Yasuharu HOSAKA 2017-02-14
9472429 Method for manufacturing semiconductor device Shingo Eguchi, Yohei Monma, Misako Hirosue, Kenichi Hashimoto, Yasuharu HOSAKA 2016-10-18
9397126 Peeling apparatus and manufacturing apparatus of semiconductor device Shingo Eguchi, Yohei Monma, Misako Hirosue, Kenichi Hashimoto, Yasuharu HOSAKA 2016-07-19
9087931 Peeling apparatus and manufacturing apparatus of semiconductor device Shingo Eguchi, Yohei Monma, Misako Hirosue, Kenichi Hashimoto, Yasuharu HOSAKA 2015-07-21
9054141 Method for manufacturing semiconductor device Shingo Eguchi, Yohei Monma, Misako Hirosue, Kenichi Hashimoto, Yasuharu HOSAKA 2015-06-09
8889438 Peeling apparatus and manufacturing apparatus of semiconductor device Shingo Eguchi, Yohei Monma, Misako Hirosue, Kenichi Hashimoto, Yasuharu HOSAKA 2014-11-18
8137417 Peeling apparatus and manufacturing apparatus of semiconductor device Shingo Eguchi, Yohei Monma, Misako Hirosue, Kenichi Hashimoto, Yasuharu HOSAKA 2012-03-20
8048770 Method for manufacturing semiconductor device Shingo Eguchi, Yohei Monma, Misako Hirosue, Kenichi Hashimoto, Yasuharu HOSAKA 2011-11-01
8048777 Method for manufacturing semiconductor device Shingo Eguchi, Yohei Monma, Misako Hirosue, Kenichi Hashimoto, Yasuharu HOSAKA 2011-11-01
8043936 Method for manufacturing semiconductor device Shingo Eguchi, Yohei Monma, Misako Hirosue, Kenichi Hashimoto, Yasuharu HOSAKA 2011-10-25