Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6384353 | Micro-electromechanical system device | Jenn Hwa Huang, Samuel L. Coffman, Xi Sun, Ji-Hai Xu | 2002-05-07 |
| 6362018 | Method for fabricating MEMS variable capacitor with stabilized electrostatic drive | Ji-Hai Xu, Jenn Hwa Huang | 2002-03-26 |
| 6307169 | Micro-electromechanical switch | Xi Sun, Jenn Hwa Huang, Ji-Hai Xu | 2001-10-23 |
| 6140703 | Semiconductor metallization structure | Wayne A. Cronin, Brian L. Scrivner, Kirby F. Koetz | 2000-10-31 |