Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11772115 | Substrate treating apparatus and treatment liquid dispensing method for controlling a temperature of treatment liquid | Kang Suk Lee, Joo-Sung Lee | 2023-10-03 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11772115 | Substrate treating apparatus and treatment liquid dispensing method for controlling a temperature of treatment liquid | Kang Suk Lee, Joo-Sung Lee | 2023-10-03 |