Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11915905 | Support unit and substrate treating apparatus including the same | Hyoungkyu Son, Yu Dong Han, Hyeon Gyu Kim | 2024-02-27 |
| 6696851 | Reception line break detection apparatus | — | 2004-02-24 |