Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8979462 | Substrate-processing apparatus and method of transferring substrate in the same | Kyung-Mo Kim | 2015-03-17 |
| 8676374 | Substrate-processing apparatus and method of transferring substrate in the same | Hyun-Woo Kim | 2014-03-18 |