Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11658010 | Substrate support unit and substrate processing apparatus including the same | Dae Hyun Kim | 2023-05-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11658010 | Substrate support unit and substrate processing apparatus including the same | Dae Hyun Kim | 2023-05-23 |