Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10199249 | Transfer unit, apparatus for treating substrate, and method for treating substrate | Hyunho Lee | 2019-02-05 |
| 9079304 | Transfer unit, method for controlling the transfer unit, and apparatus and method for treating substrate using the transfer unit | Woosung Kim | 2015-07-14 |