Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8690516 | Method of adjusting velocity of transfer member, method of transferring substrate using the method, and substrate-processing apparatus | Sang-Eun Jun | 2014-04-08 |
| 8615323 | Substrate-processing apparatus and method of transferring substrate in the same | Jun Ho You | 2013-12-24 |