Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11894219 | Method for processing substrate | — | 2024-02-06 |
| 11631606 | Substrate storage apparatus and apparatus for processing substrate using the same | Duk Hyun Son | 2023-04-18 |