Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9184068 | Substrate treating apparatus for adjusting temperature of treating liquid | Sang Uk Park | 2015-11-10 |
| 8186297 | Nozzle and apparatus and method for processing substrate using the nozzle | Sung-Woon PARK, Sang Uk Park | 2012-05-29 |
| 5801315 | Developer flow check system and method thereof | Geun PARK, Kil Kim, Dong-heyun Kim | 1998-09-01 |
| 5171881 | Process for producing trimellitic acid | Sang-Hoon Park, Jung Wook Sim, Chun-Gyu Kim | 1992-12-15 |