Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9685357 | Apparatus for treating substrate | Soo Min Hwang | 2017-06-20 |
| 8631756 | Apparatus for processing substrate and method of maintaining the apparatus | — | 2014-01-21 |
| 6357938 | Coating and developing process system | Ki-Whan Shim, Hee Kang | 2002-03-19 |