Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12240259 | Substrate processing device and control method for substrate processing device | Sang Min HA, Jae Hong Kim, Sang Hyun SON, Young-joo Seo | 2025-03-04 |
| 12134271 | Pressure control device and substrate treatment apparatus including the same | Dong Hwa LEE, Dai Geon Yoon, Bong Man Choi, Jong Suk Won | 2024-11-05 |
| 11919303 | Jetting driver and substrate treatment apparatus and method | Sang Min HA, Sang Hyun SON, Young-joo Seo, Jae Hong Kim | 2024-03-05 |