Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11380565 | Substrate transfer apparatus, substrate processing apparatus including the same, and substrate misalignment compensation method | Hyun Jun Kim | 2022-07-05 |
| 10446429 | Apparatus and method for treating substrate | — | 2019-10-15 |
| 10388550 | Method for detecting the center of substrate, method for transporting a substrate, transporting unit and apparatus for treating a substrate including the unit | Hyun Jun Kim | 2019-08-20 |
| 9966285 | Teaching method and substrate treating apparatus using the same | Jun Ho You | 2018-05-08 |