| 12417934 |
Substrate treating apparatus and substrate transfer robot |
Yong Hee Lee, Jin Woo Jung, Mi So PARK |
2025-09-16 |
| 12325053 |
Substrate treating apparatus and substrate treating method |
Jin Woo Jung, Young-Hun Lee |
2025-06-10 |
| 12278119 |
Apparatus for treating substrate |
Myung Seok Cha, Sang Min Lee, Jin Woo Jung |
2025-04-15 |
| 12266561 |
Apparatus for treating substrate and method of coupling support unit |
Sang Min Lee |
2025-04-01 |
| 12222159 |
Apparatus and method for treating substrate |
Yong Hyun Choi, Eui Sang Lim, Jun Young Choi |
2025-02-11 |
| 11908710 |
Apparatus and method for processing substrate |
Jin Woo Jung, Yong Hee Lee |
2024-02-20 |
| 9899671 |
Method for preparing metal oxide nanoparticle/graphene composite using supercritical fluid and metal oxide nanoparticle/graphene composite prepared by the same |
Jaehoon Kim, Wenying Li, Ji Eun HWANG |
2018-02-20 |