Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5472811 | Phase shifting mask structure with multilayer optical coating for improved transmission | Prahalad K. Vasudev | 1995-12-05 |
| 5418095 | Method of fabricating phase shifters with absorbing/attenuating sidewalls using an additive process | Prahalad K. Vasudev | 1995-05-23 |
| 5411824 | Phase shifting mask structure with absorbing/attenuating sidewalls for improved imaging | Prahalad K. Vasudev | 1995-05-02 |