Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5479340 | Real time control of plasma etch utilizing multivariate statistical analysis | Edward P. Fox | 1995-12-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5479340 | Real time control of plasma etch utilizing multivariate statistical analysis | Edward P. Fox | 1995-12-26 |