Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6858446 | Plasma monitoring method and semiconductor production apparatus | Atsushi Denda | 2005-02-22 |
| 6447691 | Method for detecting end point of plasma etching, and plasma etching apparatus | Atsushi Denda | 2002-09-10 |
| 6440260 | Plasma monitoring method and semiconductor production apparatus | Atsushi Denda | 2002-08-27 |
| 6124410 | Method for purification of alpha-olefins for polymerization use and method for production of poly-alpha-olefins | Kazuo Yasuda, Shougo Shimonishi | 2000-09-26 |