Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8234013 | Semiconductor manufacturing system and method for waste liquid collection | Atsushi Osada | 2012-07-31 |
| 7937189 | Method and system for controlling semiconductor manufacturing equipment | — | 2011-05-03 |
| 7885728 | Method and system for controlling semiconductor manufacturing apparatus | — | 2011-02-08 |
| 7853347 | Semiconductor manufacturing system, controller, semiconductor manufacturing system control method, and processing liquid collection method | Atsushi Osada | 2010-12-14 |
| 7826916 | Method and system for controlling semiconductor manufacturing equipment | — | 2010-11-02 |
| 7684903 | Method and system for controlling semiconductor manufacturing apparatus | — | 2010-03-23 |