Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10236248 | Semiconductor device and manufacturing method thereof | Kunio Watanabe, Tatsuki Shirasawa, Takashi Sakuda | 2019-03-19 |
| 9997370 | Electronic apparatus, manufacturing method thereof, oscillator, electronic appliance, and mobile unit | — | 2018-06-12 |
| 9499394 | MEMS device and method of manufacturing the same | — | 2016-11-22 |
| 9434605 | MEMS device | — | 2016-09-06 |
| 9434607 | MEMS device | — | 2016-09-06 |
| 9388039 | MEMS device and method of manufacturing the same | — | 2016-07-12 |
| 9331668 | Vibrator with a beam-shaped portion above a recess in a substrate, and oscillator using same | — | 2016-05-03 |
| 9285271 | Sloped structure, method for manufacturing sloped structure, and spectrum sensor | — | 2016-03-15 |
| 9285522 | Tilt structure | — | 2016-03-15 |
| 9278850 | MEMS device and method of manufacturing the same | — | 2016-03-08 |
| 9190954 | Electronic device, method for producing the same, and oscillator | — | 2015-11-17 |
| 9034763 | Sloped structure, method for manufacturing sloped structure, and spectrum sensor | — | 2015-05-19 |
| 8952467 | Electronic device and its manufacturing method | — | 2015-02-10 |
| 8951821 | Method for producing oscillator | — | 2015-02-10 |
| 8889463 | Sloped structure, method for manufacturing sloped structure, and spectrum sensor | — | 2014-11-18 |
| 8802217 | Tilt structure | — | 2014-08-12 |
| 7691740 | Semiconductor device and method of fabricating same | Noriaki Matsunaga, Naofumi Nakamura | 2010-04-06 |
| 7459391 | Semiconductor device and method of fabricating the same | Noriaki Matsunaga, Naofumi Nakamura | 2008-12-02 |
| 7091618 | Semiconductor device and method of manufacturing the same | Noriaki Matsunaga, Naofumi Nakamura | 2006-08-15 |