Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6599581 | Method of fabricating jig for vacuum apparatus | — | 2003-07-29 |
| 6596138 | Sputtering apparatus | — | 2003-07-22 |
| 5393387 | Method for treating etchant | Yasuie Mikami, Masaaki Iosaki | 1995-02-28 |