MY

Masaharu Yachi

SE Seiko Epson: 3 patents #3,864 of 7,774Top 50%
Overall (All Time): #1,649,110 of 4,157,543Top 40%
3
Patents All Time

Issued Patents All Time

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
5578163 Method of making an aluminum containing interconnect without hardening of a sidewall protection layer — 1996-11-26
5346582 Dry etching apparatus — 1994-09-13
5232537 Dry etching apparatus — 1993-08-03