Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5972802 | Prevention of edge stain in silicon wafers by ozone dipping | Masami Nakano | 1999-10-26 |
| 5893982 | Prevention of edge stain in silicon wafers by oxygen annealing | Masami Nakano | 1999-04-13 |