Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6689253 | Facing target assembly and sputter deposition apparatus | Chinsoon Koh, Jianzhong Shi, Yuanda Cheng | 2004-02-10 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6689253 | Facing target assembly and sputter deposition apparatus | Chinsoon Koh, Jianzhong Shi, Yuanda Cheng | 2004-02-10 |