Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10216099 | Substrate processing apparatus | Kazuhiro Nishimura, Yasushi Nakamura, Yasuo Kawamatsu | 2019-02-26 |
| 9494877 | Substrate processing apparatus | Kazuhiro Nishimura, Yasushi Nakamura, Yasuo Kawamatsu | 2016-11-15 |