Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11276595 | Substrate transporter and substrate transport method | — | 2022-03-15 |
| 10734266 | Substrate transporter and substrate transport method | — | 2020-08-04 |
| 10395961 | Posture changing device | — | 2019-08-27 |
| 10395962 | Substrate arrangement apparatus and substrate arrangement method | — | 2019-08-27 |
| 10229848 | Substrate alignment apparatus, substrate processing apparatus, substrate arrangement apparatus, substrate alignment method, substrate processing method, and substrate arrangement method | — | 2019-03-12 |
| 8215891 | Substrate treating apparatus, and a substrate transporting method therefor | — | 2012-07-10 |