Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12397323 | Substrate cleaning device and substrate cleaning method | Shotaro Tsuda | 2025-08-26 |
| 10685856 | Substrate processing method and substrate processing apparatus | Junichi Ishii, Takashi Shinohara | 2020-06-16 |