Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12311414 | Substrate processing device and substrate processing method | Kenji Kawaguchi, Toru Endo | 2025-05-27 |
| 11883858 | Substrate processing device and substrate processing method | Kenji Kawaguchi, Toru Endo | 2024-01-30 |
| 11318504 | Substrate processing device and substrate processing method | Kenji Kawaguchi, Toru Endo | 2022-05-03 |