Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9358587 | Substrate treating apparatus | Yukio Tomifuji, Shigeki Minami, Norio Yoshikawa | 2016-06-07 |
| 8882960 | Substrate treating apparatus and substrate treating method | Norio Yoshikawa, Yukio Tomifuji, Shigeki Minami, Kazuto Ozaki | 2014-11-11 |