| 8961688 |
Method and device for plasma treating workpieces |
Michael Lizenberg, Frank Lewin, Hartwig Muller, Klaus Vogel, Stephan Behle +4 more |
2015-02-24 |
| 7926446 |
Multi-place coating apparatus and process for plasma coating |
Stephan Behle, Andreas Luttringhaus-Henkel, Mathias Bicker, Marten Walther, Juergen Klein |
2011-04-19 |
| 7811384 |
Method and apparatus for treating substrates in a rotary installation |
Matthias Bicker, Stephan Behle, Andreas Luettringhaus-Henkel, Juergen Klein |
2010-10-12 |
| 7810448 |
Apparatus and method for the treating of workpieces |
Stephen Behle, Andreas Luttringhaus-Henkel, Matthias Bicker, Jurgen Klein |
2010-10-12 |
| 7699933 |
Method and device for the plasma treatment of workpieces |
Michael Lizenberg, Frank Allen Lewis, Hartwig Muller, Klaus Vogel, Stephan Behle +3 more |
2010-04-20 |
| 7399500 |
Rapid process for the production of multilayer barrier layers |
Matthias Bicker, Stephan Behle, Lutz Klippe, Andreas Luttringhaus-Henkel |
2008-07-15 |
| 7074275 |
Apparatus for treating workpieces |
Andreas Luttringhaus-Henkel, Jurgen Klein, Stephan Behle |
2006-07-11 |
| 6958097 |
Device for holding and vacuum-sealing a container having an opening |
Andreas Luttringhaus-Henkel, Matthias Bicker, Stephan Behle |
2005-10-25 |