Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9023297 | Method and system for producing monosilane | Christian Schmid, Jochem Hahn | 2015-05-05 |
| 8673255 | Process and apparatuses for preparing ultrapure silicon | Christian Schmid, Jochem Hahn | 2014-03-18 |
| 8105564 | Process for producing monosilane | Raymund Sonnenschein, Peter Adler, Yuriy Kasatkin, Leonid Schwarzmann | 2012-01-31 |