Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5402237 | Reflection-free ellipsometry measurement apparatus and method for small sample cells | David R. Rhiger | 1995-03-28 |
| 5313984 | Multi-fluid, variable sequence, zero dead volume valve and system | Scott M. Taylor | 1994-05-24 |
| 5275690 | Method and apparatus for wet chemical processing of semiconductor wafers and other objects | — | 1994-01-04 |