Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12135542 | Modelling and prediction of virtual inline quality control in the production of memory devices | Yusuke Ikawa, Nagarjuna Asam, Kei Samura, Masaaki Higashitani | 2024-11-05 |
| 12105137 | Virtual quality control interpolation and process feedback in the production of memory devices | Yusuke Ikawa, Kei Samura, Masaaki Higashitani | 2024-10-01 |
| 12009269 | Virtual metrology for feature profile prediction in the production of memory devices | Cheng-Chung Chu, Masaaki Higashitani, Yusuke Ikawa, Seyyed Ehsan Esfahani RASHIDI, Kei Samura +1 more | 2024-06-11 |
| 7341644 | Method for predicting consumption of consumable part, method for predicting deposited-film thickness, and plasma processor | Shinji Sakano | 2008-03-11 |
| 7054786 | Operation monitoring method for treatment apparatus | Shinji Sakano | 2006-05-30 |