Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7105098 | Method to control artifacts of microstructural fabrication | Randy J. Shul, Christi G. Willison, Ronald P. Manginell, Mary A. Mitchell, Paul C. Galambos | 2006-09-12 |
| 7095295 | Multi-tunable microelectromechanical system (MEMS) resonators | Harold L. Stalford, Michael A. Butler | 2006-08-22 |
| 6930051 | Method to fabricate multi-level silicon-based microstructures via use of an etching delay layer | Ronald P. Manginell, Randy J. Shul | 2005-08-16 |
| 6822929 | Micro acoustic spectrum analyzer | Michael A. Butler, Douglas R. Adkins, Larry F. Anderson | 2004-11-23 |
| 5792280 | Method for fabricating silicon cells | Douglas S. Ruby, Paul Alan Basore | 1998-08-11 |
| 5789745 | Ion mobility spectrometer using frequency-domain separation | Stephen J. Martin, Michael A. Butler, Gregory C. Frye | 1998-08-04 |
| 5279795 | Extended range chemical sensing apparatus | Robert C. Hughes | 1994-01-18 |