Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 6096656 | Formation of microchannels from low-temperature plasma-deposited silicon oxynitride | Carolyn M. Matzke, Carol I. H. Ashby, Ronald P. Manginell | 2000-08-01 | $28,129,000 |