Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7597819 | Redox buffered hydrofluoric acid etchant for the reduction of galvanic attack during release etching of MEMS devices having noble material films | — | 2009-10-06 |
| 7045170 | Anti-stiction coating for microelectromechanical devices | Thomas Mayer, David R. Wheeler | 2006-05-16 |