Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7608367 | Vitreous carbon mask substrate for X-ray lithography | Dawn M. Skala, Stewart Griffiths, Albert Alec Talin, Matthew Losey, Chu-Yeu Peter Yang | 2009-10-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7608367 | Vitreous carbon mask substrate for X-ray lithography | Dawn M. Skala, Stewart Griffiths, Albert Alec Talin, Matthew Losey, Chu-Yeu Peter Yang | 2009-10-27 |