Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5997949 | Synthesis of W-Si-N films by chemical vapor deposition using WF.sub.6, SiH.sub.4 and NH.sub.3 | Marc Nicolet, Roland Madar, Claude Bernard, James G. Fleming, Paul Michael Smith +2 more | 1999-12-07 |
| 5916634 | Chemical vapor deposition of W-Si-N and W-B-N | James G. Fleming, Paul Michael Smith, Jonathan S. Custer, Ronald V. Jones, Marc Nicolet +2 more | 1999-06-29 |