Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7601469 | Plasma etching chamber and method for manufacturing photomask using the same | Jeong Yun Lee, Jin Min Kim, Hae-Young Jeong, Sang Joon Yoon, Sung-Yong Cho | 2009-10-13 |