Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8202140 | Wafer polishing carrier apparatus and chemical mechanical polishing equipment using the same | Jong Yoon PARK, Hyun-Joon Park | 2012-06-19 |
| 6899609 | CMP equipment for use in planarizing a semiconductor wafer | — | 2005-05-31 |
| 6595836 | Calibration device for pad conditioner head of a CMP machine | — | 2003-07-22 |