Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6178390 | Method for controlling thicknesses of layers formed by deposition equipment for fabricating semiconductor devices | — | 2001-01-23 |
| 5780317 | Apparatus for forming oxide film of semiconductor device | Jae-Man Jang, Sang-Kook Choi, Chan-Sik Park | 1998-07-14 |