Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10910242 | Temperature controller for manufacturing semiconductor | Cheol Won Jang, Min Jin Han, Jae Geon Kim | 2021-02-02 |
| 6271134 | Apparatus for manufacturing semiconductor device method for forming HSG-polysilicon layer using same and method for forming capacitor having electrode of HSG-polysilicon layer | Dae-oh Ha | 2001-08-07 |