Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12106942 | Plasma processing apparatus and method for dechucking wafer in the plasma processing apparatus | Kui Hyun Yoon, Yun Hwan Kim, Moon Eon Lee, Seok Woo Lee, Dong Hee Han | 2024-10-01 |