Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7521698 | Apparatus and method for interlocking a power supply to ion implantation equipment, method and apparatus for generating an interlocking signal, method and apparatus for interrupting an ion implantation process, and an interlocking system | — | 2009-04-21 |
| 7115490 | Apparatus and method for interlocking a power supply to ion implantation equipment, method and apparatus for generating an interlocking signal, method and apparatus for interrupting an ion implantation process, and an interlocking system | — | 2006-10-03 |
| 7068003 | System to determine proper wafer alignment | — | 2006-06-27 |
| 7019316 | High-energy ion implanter and method of operation thereof | — | 2006-03-28 |
| 6300642 | Method for monitoring Faraday cup operation in an ion implantation apparatus | Seok-Ho Go, Joon Ho Lee, Jae-Im Yun | 2001-10-09 |