Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6041733 | Plasma processing apparatus protected from discharges in association with secondary potentials | Chang Sik Kim, Jin-Ho Park, Kyeong-seob Moon, Young Ho Seo, Byung-mook Choi +1 more | 2000-03-28 |
| 5885404 | Pedestal with self retaining sealing ring for semiconductor device etching system | Sang-Ho Kim | 1999-03-23 |