Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11309205 | Electrostatic chuck and electrostatic adsorption apparatus having the same | Min Ho BAE, Hyok Keo Se Kwon | 2022-04-19 |
| 10601346 | Electrostatic chuck and electrostatic adsorption apparatus | Min Ho BAE, Byung Moo Kim, Yun Soo Kim | 2020-03-24 |