Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10054513 | Apparatus and method of sensing liquid leakage for lithography apparatus | Sung-Joo Kim, Jin-Pyoung Kim, Do Hyun SEO, Jae-Pil Lee, Hyun-Hoon Lee | 2018-08-21 |
| 9635749 | Apparatus for generating extreme ultraviolet light | Sung-Joo Kim, Jin-Seok Heo, Do Hyun SEO, Da-Hae Lee, Jae-Pil Lee | 2017-04-25 |